A sensitive detection method for capacitive ultrasonic transducers
نویسندگان
چکیده
منابع مشابه
The Microfabrication of Capacitive Ultrasonic Transducers
Surface-micromachined capacitive ultrasonic transducers, which are suitable for operation in both air and water, have been fabricated and tested. Amorphous silicon is used as a sacrificial layer because of its good etching selectivity versus a nitride membrane, and improved cell-size control is obtained by lithographic definition of cavity walls. In addition, appropriate feature designs based o...
متن کاملCapacitive Micromachined Ultrasonic Transducers: Theory and Technology
Capacitive micromachined ultrasonic transducers ~CMUTs!, introduced about a decade ago, have been shown to be a good alternative to conventional piezoelectric transducers in various aspects, such as sensitivity, transduction efficiency, and bandwidth. In this paper, we discuss the principles of capacitive transducer operation that underlie these aspects. Many of the key features of capacitive u...
متن کاملCapacitive micromachined ultrasonic transducers for medical imaging and therapy.
Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure, and operating principles. Our progression of developing seve...
متن کاملCapacitive micromachined ultrasonic transducers for robotic sensing applications
Ultrasonic ranging is the most common method used in robotic systems for distance or proximity sensing. The heart of the method is an ultrasonic transducer that emits and detects ultrasound. There are mainly two types of transducers existing in the market today; piezoelectric and electrostatic. In this paper, we propose the use of a new type of transducer, which is capacitive micromachined ultr...
متن کاملSingulation for imaging ring arrays of capacitive micromachined ultrasonic transducers.
Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CM...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 1998
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.121506